JPH0558484B2 - - Google Patents

Info

Publication number
JPH0558484B2
JPH0558484B2 JP60235831A JP23583185A JPH0558484B2 JP H0558484 B2 JPH0558484 B2 JP H0558484B2 JP 60235831 A JP60235831 A JP 60235831A JP 23583185 A JP23583185 A JP 23583185A JP H0558484 B2 JPH0558484 B2 JP H0558484B2
Authority
JP
Japan
Prior art keywords
vibrating
base
central axis
vibrating part
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60235831A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6295421A (ja
Inventor
Takeshi Hojo
Takafumi Nakaishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Keiki Inc
Original Assignee
Tokimec Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokimec Inc filed Critical Tokimec Inc
Priority to JP60235831A priority Critical patent/JPS6295421A/ja
Priority to US06/920,503 priority patent/US4792676A/en
Publication of JPS6295421A publication Critical patent/JPS6295421A/ja
Publication of JPH0558484B2 publication Critical patent/JPH0558484B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP60235831A 1985-10-22 1985-10-22 ジヤイロ装置 Granted JPS6295421A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60235831A JPS6295421A (ja) 1985-10-22 1985-10-22 ジヤイロ装置
US06/920,503 US4792676A (en) 1985-10-22 1986-10-20 Gyro apparatus with a vibration portion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60235831A JPS6295421A (ja) 1985-10-22 1985-10-22 ジヤイロ装置

Publications (2)

Publication Number Publication Date
JPS6295421A JPS6295421A (ja) 1987-05-01
JPH0558484B2 true JPH0558484B2 (en]) 1993-08-26

Family

ID=16991904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60235831A Granted JPS6295421A (ja) 1985-10-22 1985-10-22 ジヤイロ装置

Country Status (2)

Country Link
US (1) US4792676A (en])
JP (1) JPS6295421A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0674500U (ja) * 1993-03-30 1994-10-21 株式会社村上開明堂 電動格納式ドアミラーの駆動力伝達装置

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Publication number Priority date Publication date Assignee Title
US5216490A (en) * 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
DE3836954A1 (de) * 1988-10-29 1990-05-03 Philips Patentverwaltung Verfahren und anordnung zur ermittlung der lage der optischen achse eines lwl
US5126812A (en) * 1990-02-14 1992-06-30 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical accelerometer
US5473945A (en) * 1990-02-14 1995-12-12 The Charles Stark Draper Laboratory, Inc. Micromechanical angular accelerometer with auxiliary linear accelerometer
DE4028858A1 (de) * 1990-09-08 1992-03-12 Arnold & Richter Kg Pendellager fuer ein praezisionsmesspendel
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5635639A (en) * 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5646348A (en) * 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5581035A (en) * 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
US5594169A (en) * 1994-11-04 1997-01-14 Gyration,Inc. Optically sensed wire gyroscope apparatus and system, and methods for manufacture and cursor control
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
US5837998A (en) * 1996-06-24 1998-11-17 Dinev; Petko D. Two-dimensional fiber optic acceleration and vibration sensor
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5952574A (en) * 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US7124634B2 (en) * 2003-07-29 2006-10-24 The Boeing Company Single plate capacitive acceleration derivative detector
US6785975B1 (en) * 2003-08-05 2004-09-07 The Boeing Company Accelerometer augmented precision compass
US7310577B2 (en) * 2004-09-29 2007-12-18 The Boeing Company Integrated capacitive bridge and integrated flexure functions inertial measurement unit
US7360425B2 (en) * 2004-11-22 2008-04-22 The Boeing Company Compensated composite structure
US7228739B2 (en) 2004-11-23 2007-06-12 The Boeing Company Precision flexure plate
US7331229B2 (en) * 2004-12-09 2008-02-19 The Boeing Company Magnetic null accelerometer
US7137208B2 (en) * 2004-12-14 2006-11-21 The Boeing Company Leveling device
US7296470B2 (en) * 2005-04-14 2007-11-20 The Boeing Company Extended accuracy flexured plate dual capacitance accelerometer
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3486383A (en) * 1965-01-04 1969-12-30 Singer General Precision Vibrating beam transducer
US3709030A (en) * 1970-05-27 1973-01-09 Tne Inc Vibration detection apparatus
US4019391A (en) * 1975-07-25 1977-04-26 The Singer Company Vibratory gyroscope
SE411687B (sv) * 1978-05-31 1980-01-28 Aga Ab Accelerometer for metning av vinkellege i vertikalled
US4239963A (en) * 1978-07-26 1980-12-16 Rockwell International Corporation Fiber optic accelerometer
US4458536A (en) * 1982-07-06 1984-07-10 The Charles Stark Draper Laboratory, Inc. Multiaxial vibration sensor
US4590801A (en) * 1983-09-02 1986-05-27 Sundstrand Data Control, Inc. Apparatus for measuring inertial specific force and angular rate of a moving body
CA1250458A (en) * 1983-10-31 1989-02-28 Edward J. Loper, Jr. Hemispherical resonator gyro
US4649748A (en) * 1984-03-30 1987-03-17 Kabushikikaisha Tokyo Keiki Accelerometer
GB2158243B (en) * 1984-05-05 1986-10-22 Ferranti Plc Accelerometer system
US4568414A (en) * 1984-09-21 1986-02-04 At&T Technologies, Inc. Methods and apparatus for tensioning sheet material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0674500U (ja) * 1993-03-30 1994-10-21 株式会社村上開明堂 電動格納式ドアミラーの駆動力伝達装置

Also Published As

Publication number Publication date
JPS6295421A (ja) 1987-05-01
US4792676A (en) 1988-12-20

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